Title

Motivation

Outline

1. Molecular Dynamics Simulation

Numerical Integration Algorithm

Many-body Potential for Metallic Bond

He-W Potential

Firsov Model of Electronic Stopping

Electronic Stopping Power of He in W

Coupling to Heat Bath

Energy Distribution of Target Atoms before Ion Impact

2. Cluster Ejection Due to Cluster Impact

Crater Formation

High Deposited Particle Density

High Density Formation

Feature of Cluster Ion

Simulation Model

Sputtering Database

Time Evolution of Sputtered Cluster Yield

Trajectory of Sputtered Particles

Estimation of Internal Energy

Internal Energy Distributions of Sputtered Clusters

Vibration Energy Distributions of Sputtered Clusters

Ratio of Cluster Formation Process

Abundance Distribution of Sputtered Clusters

Correlation between Sputtering Yield and Exponent

Summary

3. Sputtering by Monatomic Ion Impact

Simulation Model

Sputtering Database

Results of MD and BCA: 5keV Ar->Cu

Total and Monomer Yield : 5keV Ar->Cu

Effect of Crystal Structure : 5keV Ar->Cu

Results of MD and BCA: 1keV He->W

Appendix 1: Simulation Codes of Ion-solid Interactions

Appendix 2: Model of ACAT Simulation

Introduction of Time-ordered BCA code (DYACOCT) is here.